Abstract:
Barium Zirconium Titanate (BZT)) thin layer is the most interesting material to be studied
because it has a high dielectric constant. A thin film of Barium Zirconium Titanate fabricated
with sol-gel method with composition of x= 0.80 and x= 0.85 was annealed with temperature
variation of 550°C, 600°C and 650° C 1 hour. Barium Zirconium Titanate thin films
characterized using X-Ray Diffraction (XRD). Based on the XRD pattern, the lattice
parameters, crystal structure, and crystal size can be determined. Crystal size was calculated
based on diffraction pattern using the Scherrer formula. The result shows that annealing
temperature affects the crystal size of the samples. The value of lattice parameters of a = b for
composition x = 0.80 is 3.74 Å and for the value of c is 3.91 Å , while for composition x = 0.85
shows the value of a = b is 3.72 Å and for the value of c of 4.25 Å. The crystal size for x =
0.8;0.85 with a temperature of 550oC, 600oC and 650oC are 22,56 nm, 29,02 nm, 32,49 nm,
35,33 nm, 42,76 nm and 50,78 nm. respectively. This result shows the crystal structure of BZT
is tetragonal since the value of the lattice parameter were a=b c.
