KARAKTERISASI PERBEDAAN SUHU ANNEALING FILM TIPIS BaZr0,3Ti0,7O3 DENGAN MENGGUNAKAN X-RAY DIFFRACTION (XRD)

Abstract

Thin layer of barium zirconium titanate (BaZr0,3Ti0,7O3) was grown on a glass substrate using sol-gel method with variations in annealing temperature assisted by a spin coating process at a speed of 3000 rpm. The BaZr0,3Ti0,7O3 thin layer was annealed for 1 hour at a temperature of 600oC and 650oC. Characterization was carried out using X-Ray Diffractometer (XRD) to determine the crystal structure, lattice parameters, and type of structure. The crystal structure shows that the lattice parameters are a = b ≠ c, it can be concluded that the crystal structure is tetragonal. The particle size was obtained using Scherer formula. The two annealing temperatures produced in XRD characterization produced the same 2θ angles, namely 22.29o, 31.61o, 38.31o and 47.54o. The increase in annealing temperature does not affect the diffraction angle but rather affects the intensity.