Amelia, Mila2021-10-192021-10-192021-03wahyu sari yenihttps://repository.unri.ac.id/handle/123456789/10268Barium Titanate (BaTiO3) is a ferroelectric material that has a high dielectric constant value, which can be made in the form of a thin layer. A thin layer of Barium Titanate (BaTiO3) doped with Zr to form Ba (ZrxTi1-x) O3 was successfully prepared using sol gel method with the composition of x = 0.2 and x = 0.4. A thin layer was created on the glass substrate using a spin coating for 30 seconds at a speed of 3000rpm. BZT was annealed with temperature variations of 600oC and 650oC and characterized using X-Ray Diffractometer (XRD) to determine lattice parameters, crystalline structure, and crystalline size using the Scherrer formula. Based on the analysis, the thin layer has a tetragonal crystalline structure with the lattice parameters value for the composition x = 0.2 is a = b = 4.02 Å and c = 4.06 Å, the composition x = 0.4 is a = b = 4, 06 Å and c = 4.10Å. The crystal size for x = 0.2;0.4 with a temperature of 600oC and 650oC are 33,84 nm, 45,05 nm, 50,66 nm, dan 67,54 nm respectively.enBarium Zirconium TitanateSol Gel MethodAnnealingXRD CharacterizationArticle