Fitriani, Nisya Adia2022-01-192022-01-192021-07wahyu sari yenihttps://repository.unri.ac.id/handle/123456789/10421Barium Zirconium Titanate (BZT)) thin layer is the most interesting material to be studied because it has a high dielectric constant. A thin film of Barium Zirconium Titanate fabricated with sol-gel method with composition of x= 0.80 and x= 0.85 was annealed with temperature variation of 550°C, 600°C and 650° C 1 hour. Barium Zirconium Titanate thin films characterized using X-Ray Diffraction (XRD). Based on the XRD pattern, the lattice parameters, crystal structure, and crystal size can be determined. Crystal size was calculated based on diffraction pattern using the Scherrer formula. The result shows that annealing temperature affects the crystal size of the samples. The value of lattice parameters of a = b for composition x = 0.80 is 3.74 Å and for the value of c is 3.91 Å , while for composition x = 0.85 shows the value of a = b is 3.72 Å and for the value of c of 4.25 Å. The crystal size for x = 0.8;0.85 with a temperature of 550oC, 600oC and 650oC are 22,56 nm, 29,02 nm, 32,49 nm, 35,33 nm, 42,76 nm and 50,78 nm. respectively. This result shows the crystal structure of BZT is tetragonal since the value of the lattice parameter were a=b c.enBarium Zirconium TitanateSol Gel MethodAnnealingXRD CharacterizationArticle