ANALISA VARIASI WAKTU TAHAN PROSES ANNEALING FILM TIPIS BARIUM ZIRKONIUM TITANAT BaZr0,5Ti0,5O3 DENGAN MENGGUNAKAN KARAKTERISASI SCANNING ELECTRON MICROSCOPY (SEM)

Abstract

The thin layer of Barium Zirconium Titanate (BZT) has been successfully fabricated on an FTO substrate using sol-gel method and growing with spin coating. The thin films were annealed at 700oC for 30, 60, 90 and 120 minutes. Characterization of the thin films was carried out using Scanning Electron Microscopy (SEM) to determine their grain size and thickness. The results of SEM photographs analysis showed that the average grain sizes for annealing times of 30; 60; 90; and 120 minutes, respectively, is 130.181 ± 36.117 nm; 185.918 ± 58.303; 240.414 ± 73.750 nm; and 256.765 ± 64.569 nm and the average thicknesses is 597.241 ± 89.967 nm, 565.975 ± 77.626 nm, 513.537 ± 69.534 nm; and 440.076 ± 65.576 nm. The data obtained indicate that the grain size of the BZT layer increases with the widening of the grain diameter due to the diffusion process. The BZT elements are more compressed and the solvent that is still trapped is reduced due to the longer holding time in the annealing process, causing the reduction of the layer thickness.