PENGARUH SUHU ANNEALING TERHADAP MIKROSTRUKTUR DAN MORFOLOGI LAPISAN TIPIS BaZr0,45Ti0,55O3 YANG DITUMBUHKAN DENGAN METODE SOL-GEL

Abstract

Ferroelectric is an electronic material, the dielectric in particular, which can be applied as a capacitor. Ferroelectric is able to change the direction of its internal electric field by the use of a suitable electric field. Barium Titanate is a ferroelectric material which can be doped with zirconium and made in the form of a thin film. The addition of zirconium doping to Barium Titanate will increase the dielectric constant of the material. The making of Barium Zirconiun Titanate thin film with the composition (BaZr0,45Ti0,55O3) has been successfully prepared using the sol-gel method. The annealing temperature variations are 600oC and 650oC with a 1 hour holding time and characterized using XRD and SEM. The XRD characterization results obtain lattice parameters of a = b = 3.97 and c = 4.25 Ȧ, and thereby, the crystal structure is tetragonal. The crystallinity level is highly increasing with increased annealing temperature, indicated by increased intensity. SEM characterization shows that at annealing temperature of 600oC, the grain size is not clearly visible, so the grain size cannot be determined. At a temperature of 650oC, the grain size can be determined with the average grain size of about 134.5 nm