FABRIKASI FILM TIPIS BARIUM ZIRKONIUM TITANAT BaZrxTi(1-x)O3 MENGGUNAKAN METODE SOL GEL DENGAN KARAKTERISASI DIFRAKSI SINAR X

Abstract

A thin film of Barium Zirkonium Titanat (BZT) was deposited by using sol-gel method at glass substrate on 600℃ and 650℃ temperature. A thin film of BZT was characterized by using X-Ray Diffraction for observing the crystal structure, lattice parameter and crystal size. According to analysis result shows the crystal structure is tetragone with a=b=3,90 Å dan c=3,95 Å lattice parameter for BaZr0,7Ti0,3O3, and a=b=3,85 Å dan c=3,90 Å for BaZr0,75Ti0,25O3. The crystal structure for BaZr0,7Ti0,3O3 dan BaZr0,75Ti0,25O3 on 600℃ and 650℃ respectively are 26.17 nm, 27.97 nm, 28.95 nm dan 31.06 nm. The crystal size is increasing by increasing temperature, yet deacrease by decreasing composition.