Abstract:
Barium titanate (BaTiO3) is a basic ferroelectric component material which made in the form of a thin
film. Barium Titanate is doped with Zr and made a thin film (BaZr0.35Ti0.65O3). BZT is the main
material that is most interesting to be studied because it has a high dielectric constant. This thin film
was deposited onto glass substrate that assisted by spin coating with speed of 3000 rpm for 30
seconds. The growth of this thin film was made by variying annealing temperature of 600 and 650
for 1 hour. The BaZr0,35Ti0,65O3 was anlyzed using X-Ray Diffraction (XRD) method and the
crystallite size of the sample was determined using Scherrer formula. The crystallite size of the
sample is affected by the annealing temperature. Moreover, the X-Ray Diffraction results show that
the crystal structure of the sample is tetragonal, that has a lattice parameters of a = b = 4.00 and c
= 4.02 angstroms.
