Abstract:
The thin film of Barium Strontium Titanate (BST) has been studied with
composition of by using sol-gel method that annealed in
temperature of 600o and 650o. The thin film of BST is characterized by using
Field Emission Scanning Electron Microscopy (FESEM) and an impedance
spectroscopy. The result samples in temperature of 600o and 650o are 46 nm and
141 nm in thickness respectively. The result obtained from the impedance
spectroscopy characterization are frequency, real impedance, and imaginer
impedance. The capacitance of the thin film of BST in temperature of 600o and
650o are 0,15 Farad dan 0,154 Farad. The dielectric constant of the thin film of
BST in temperature of 600o and 650o are 321,86 dan 109,32 respectively.
