PEMBUATAN FILM TIPIS BARIUM STRONTIUM TITANAT (BST) MENGGUNAKAN METODE SOL-GEL YANG DIKARAKTERISASI DENGAN SPEKTROSKOPI IMPEDANSI

Abstract

This paper investigates a thin film Barium Strontium Titanate (BST) with compositions of Ba0,9Sr0,1TiO3, Ba0,8Sr0,2TiO3 and Ba0,7Sr0,3TiO3 by using sol-gel method that has been annealing at a temperature of 7000C in order to describe a crystalline structure. BST thin film of three compositions was characterized by using Field Emission Scanning Microscopy (FESEM) and Impedance Spectroscopy. The characterization results the thickness of thin film Ba0,9Sr0,1TiO3, Ba0,8Sr0,2TiO3 and Ba0,7Sr0,3TiO3 were respectively 97,69 nm; 44,74 nm and 15,79 nm. The impedance spectroscopy measured a frequency, real impedance (Z’) and imaginer impedance (Z”). The analysis results of real impedance and imaginer impedance showed the area between the contact and the sample (interface). The capacitance value of the BST thin film with compositions of Ba0,9Sr0,1TiO3, Ba0,8Sr0,2TiO3 and Ba0,7Sr0,3TiO3 at 1 Hz, was respectively 3,1 x 10-8 F/m; 2,57 x 10-8 F/m and 2,26 x 10-8 F/m. The dielectric constant value of the BST thin film with compositions Ba0,9Sr0,1TiO3, Ba0,8Sr0,2TiO3 and Ba0,7Sr0,3TiO3 at 1 Hz, was respectively 3,4 x 10-2; 1,3 x 10-2 and 4,03 x 10-3.